Main function:Mask aligner at various UV wavelengths
Maximum sample:up to 8 inches
Minimum Sample:Engraving Specimens Available
UV Wavelength:Default 365/405/436nm
Contact method:soft contact, hard contact, vacuum contact
Camera magnification:up to 900x
Utilities required:vacuum, pneumatic, electricity 220VAC/50Hz, N2 gas
Equipment size:1160 mm (W) x 920 mm (D) x 1760 mm (H)
Equipment weight:300kg