TV551 Navigator Pump 진공펌프

가격협의

전화번호 : 0504-3105-4154

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10홀 - 공구, 부품, 소재

제품 상세정보

Parameter		TV551
Pumping speed (with inlet screen)		CFF 6"	CFF 8"/ISO160
	N₂	350 l/s	550 l/s
	He	450 l/s	600 l/s
	H₂	450 l/s	510 l/s
Compression ratio	N₂	1 x 10⁹
	He	1 x 10⁷
	H₂	1 x 10⁶
Base pressure (According to standard DIN 28 428, the base pressure is that measured in a leak-free test dome, 48 hours after the completion of test dome bake-out, with a Turbopump fitted with a ConFlat flange and using the recommended pre-vacuum pump)		* with minimum recommended mechanical pump: 　　　　< 1 x 10⁻¹⁰ mbar 　　　　(< 1 x 10⁻¹⁰ Torr) * with minimum recommended diaphragm pump: 　　　　2 x 10⁻⁹ mbar 　　　　(1.5 x 10⁻⁹ torr)
Inlet flange		ISO 160, CF 6", CF 8”
Foreline flange		KF 25 NW
Rotational speed		42000 rpm
Start-up time		< 5 minutes
Recommended forepump	Mechanical	Agilent DS 302
Recommended forepump	Dry	Agilent Triscroll PTS 300
Operating position		Any
Operating ambient temperature		+5 °C to +35 °C
Cooling requirements		Natural air convection Water optional (use water with electrical conductivity ≤ 500 μS/cm)
Cooling water		flow:200 l/h (0.89 GPM) temperature:+ 10° C to + 30° C pressure:3 to 5 bar (45 to 75 Psi)
Bakeout temperature		120° C at inlet flange max.(CF flange) 80° C at inlet flange max.(ISO flange)
Max permissible rotor temperature		120 °C
Vibration level (displacement)		< 0.01 μm at inlet flange
Lubricant		permanent lubrication
Noise level		<45 dB(A) at 1 meter
Weight kg (lbs)	ISO flange	19.4 (43)
Weight kg (lbs)	CF flange	23.4 (51.6)

혜성테크놀러지

기업전시장

10홀 - 공구, 부품, 소재