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Linear Series Meter:SURFCOM CREST DX/SD
Enforce world-class high precision/high-speed measurement/high resolution
SURFCOM CREST DX
--- Features ---
High-definition magnification optical path type laser interference sensor
? Applying the laser interference measurement system through optical fiber, one of the element technologies of Tokyo Precision, a high-definition magnification optical path type laser interference sensor with a resolution of 0.31 nm was developed and mounted.
Dynamic range and resolution ratio are also 42 million:1 and are groundbreaking for tracking and evaluating a wide range of contour shapes and fine surface shapes hidden in them.
Mounting a linear motor in the drive (patent acquired)
?Driving a linear motor to implement high-precision/high-speed movement?Stable high magnification measurements are possible by reducing vibration.
A single measurement analyzes roughness and contour
?Enhances measurement efficiency while maintaining high precision.
Improvement of throughput by increasing the speed of the measuring unit (200 mm/s)
Wide measurement range of 200 mm in the width direction and 13 mm in the length direction? Automatic control of ± 45° (SURFCOM CREST-T type) with the driving tilt device?
