- Sensor:Chromatic Confocal Sensor - Side Minimum Resolution:1um - Z-Axis Minimum Resolution:3 nm - X/Y-Axis Movement Radius:200 mm (Line Drives, 50 nm Resolution) - Z-Axis Movement Radius:50 mm (Motorized:Stepper Motor) - Sample Maximum Size:250 x 250 mm - Sample Maximum Load:up to 7.5 kg