Applications :6인치 Wafer,PCB,Die 등
X/Y Travel Limits :150mm(linear drive,50nm resolution)
Z Travel Limits :100mm(servo drive,50nm resolution)
Available Sensors :Chromatic confocal,IR interferometer,CFM,WLI,RFM
Dimensions (W x L x H) :701mm x 487mm x 823mm
Weight :86kg
